Managing environmentally benign semiconductor manufacturing research

Daniel J.C. Herr

doi:10.1117/12.240089

21 May 1996 Managing environmentally benign semiconductor manufacturing research

Daniel J.C. Herr

Proceedings Volume 2725, Metrology, Inspection, and Process Control for Microlithography X; (1996) https://doi.org/10.1117/12.240089
Event: SPIE's 1996 International Symposium on Microlithography, 1996, Santa Clara, CA, United States

Abstract

'Environment, Safety and Health, having made significant contributions in recent years, finds that future requirements mandate concurrent engineering efforts in developing future technology and ensuring ESH integrity.' (National Technology Roadmap for Semiconductors, 1994, p 3). This paper examines options which enable the production of high performance, robust, and green semiconductor manufacturing technologies. Examples include innovative solutions to critical gap areas that provide a more fundamental understanding of trade-offs between device performance and high-priority ESH issues.

Citation Download Citation

Daniel J.C. Herr "Managing environmentally benign semiconductor manufacturing research", Proc. SPIE 2725, Metrology, Inspection, and Process Control for Microlithography X, (21 May 1996); https://doi.org/10.1117/12.240089

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available