Benefits applications and data analysis techniques for linewidth multilevel experimental design

Anthony Barbieri

doi:10.1117/12.240129

21 May 1996 Benefits applications and data analysis techniques for linewidth multilevel experimental design

Anthony Barbieri

Proceedings Volume 2725, Metrology, Inspection, and Process Control for Microlithography X; (1996) https://doi.org/10.1117/12.240129
Event: SPIE's 1996 International Symposium on Microlithography, 1996, Santa Clara, CA, United States

Abstract

In contrast to other experimental methods which have just two or three settings per variable, the rationale is presented for using a large number of stepper exposures at poly or active area for certain applications (such as obtaining high correlation to E-TEST variables). How variables (which are dependent on linewidth) relate to each other can also be determined to high correlation; even linear correlation of measured poly linewidth to speed had an R² value of 0.96. This experimental method is useful for numerous applications such as: process characterization, budgeting of CD linewidths, and correlating process variables to electrical data. Useful data analysis techniques are also shown. The experimental method is also cost- effective, requiring a small number of wafers.

Citation Download Citation

Anthony Barbieri "Benefits applications and data analysis techniques for linewidth multilevel experimental design", Proc. SPIE 2725, Metrology, Inspection, and Process Control for Microlithography X, (21 May 1996); https://doi.org/10.1117/12.240129

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