Removable organic antireflection coating

John L. Sturtevant; Linda J. Insalaco; Tony D. Flaim; Vandana N. Krishnamurthy; James D. Meador; John S. Petersen; Andrew R. Eckert

doi:10.1117/12.241872

14 June 1996 Removable organic antireflection coating

John L. Sturtevant, Linda J. Insalaco, Tony D. Flaim, Vandana N. Krishnamurthy, James D. Meador, John S. Petersen, Andrew R. Eckert

Author Affiliations +

Proceedings Volume 2724, Advances in Resist Technology and Processing XIII; (1996) https://doi.org/10.1117/12.241872
Event: SPIE's 1996 International Symposium on Microlithography, 1996, Santa Clara, CA, United States

Abstract

Preliminary studies with Brewer Science CD9 ARC have shown that high-intensity ultraviolet exposure results in significant changes in film properties, including thickness, plasma etch resistance, and develop rate. This process has been studied over a range of temperatures and exposure conditions, and their results are interpreted in terms of competing polymer main chain scission and crosslinking reactions. The process represents a path to improved etch performance, and the possibility exists for use of Brewer ARC in a bi-layer portable conformable mask resist scheme.

Citation Download Citation

John L. Sturtevant, Linda J. Insalaco, Tony D. Flaim, Vandana N. Krishnamurthy, James D. Meador, John S. Petersen, and Andrew R. Eckert "Removable organic antireflection coating", Proc. SPIE 2724, Advances in Resist Technology and Processing XIII, (14 June 1996); https://doi.org/10.1117/12.241872

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available