Negative resists for electron-beam lithography utilizing acid-catalyzed intramolecular dehydration of phenylcarbinol

Sonoko Migitaka; Shou-ichi Uchino; Takumi Ueno; Jiro Yamamoto; Kyoko Kojima; Michiaki Hashimoto; Hiroshi Shiraishi

doi:10.1117/12.241859

14 June 1996 Negative resists for electron-beam lithography utilizing acid-catalyzed intramolecular dehydration of phenylcarbinol

Sonoko Migitaka, Shou-ichi Uchino, Takumi Ueno, Jiro Yamamoto, Kyoko Kojima, Michiaki Hashimoto, Hiroshi Shiraishi

Author Affiliations +

Proceedings Volume 2724, Advances in Resist Technology and Processing XIII; (1996) https://doi.org/10.1117/12.241859
Event: SPIE's 1996 International Symposium on Microlithography, 1996, Santa Clara, CA, United States

Abstract

Acid-catalyzed intramolecular dehydration of phenylcarbinol is used to design highly sensitive negative resists for electron beam lithography. Of the phenylcarbinol resists evaluated in this study, the resist composed of 1,3-bis(alpha-hydroxyisopropyl)benzene (Diol-1), m/p-cresol novolak resin, and diphenyliodonium triflate (DIT) shows the best lithographic performance in terms of sensitivity and resolution. Fine 0.25-micrometer line-and-space patterns were formed by using the resist containing Diol-1 with a dose of 3.6 (mu) C/cm² in conjunction with a 50 kV electron beam exposure system.

Citation Download Citation

Sonoko Migitaka, Shou-ichi Uchino, Takumi Ueno, Jiro Yamamoto, Kyoko Kojima, Michiaki Hashimoto, and Hiroshi Shiraishi "Negative resists for electron-beam lithography utilizing acid-catalyzed intramolecular dehydration of phenylcarbinol", Proc. SPIE 2724, Advances in Resist Technology and Processing XIII, (14 June 1996); https://doi.org/10.1117/12.241859

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available