Form measurement sensor for rotation reflecting surfaces

Valentin N. Belopukhov; O. A. Zajakin; Vjacheslav N. Podvigin; Alexander F. Naumov

doi:10.1117/12.234234

1 March 1996 Form measurement sensor for rotation reflecting surfaces

Valentin N. Belopukhov, O. A. Zajakin, Vjacheslav N. Podvigin, Alexander F. Naumov

Proceedings Volume 2713, Fifth International Conference on Industrial Lasers and Laser Applications '95; (1996) https://doi.org/10.1117/12.234234
Event: Fifth International Conference on Industrial Laser and Laser Applications '95, 1995, Shatura, Moscow, Russian Federation

Abstract

It is considered the sensor which can measure a surface profile shape and a waviness as the space function. The optical head registering the local surface titles is applied in the sensor. The sensor is the adaptive action system. The device is classified as a coordinate-measurement tool.

Citation Download Citation

Valentin N. Belopukhov, O. A. Zajakin, Vjacheslav N. Podvigin, and Alexander F. Naumov "Form measurement sensor for rotation reflecting surfaces", Proc. SPIE 2713, Fifth International Conference on Industrial Lasers and Laser Applications '95, (1 March 1996); https://doi.org/10.1117/12.234234

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