Field testing industrial and medical excimer laser systems

Gary T. Forrest

doi:10.1117/12.237722

8 April 1996 Field testing industrial and medical excimer laser systems

Gary T. Forrest

Proceedings Volume 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics; (1996) https://doi.org/10.1117/12.237722
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

Testing of ultraviolet lasers with field portable notebook PC's is accomplished with UV SensorCards responding to wavelengths from 450 nm to 8 angstroms. Beam sizes from over 5 inches to less than one micron have been measured in applications including laser annealing of flat panel displays, multichip module via hole drilling, ink jet cartridge manufacturing, semiconductor lithography, and medical eye surgery. Both instant UV SensorCard and direct camera observation have been employed. The former offers submicron resolution over large areas. The latter offers real time (30 Hz) display and capture of images. UV diffractive beam splitters have been employed to allow simultaneous measurement of absolute laser power and beam profile; including absolute fluence measurement. Among the common problems in laser system operation revealed are beam misalignment, shot to shot spatial energy variation, deterioration of optics, and streaming due to gas impurities.

Citation Download Citation

Gary T. Forrest "Field testing industrial and medical excimer laser systems", Proc. SPIE 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, (8 April 1996); https://doi.org/10.1117/12.237722

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KEYWORDS

Sensors

Ultraviolet radiation

Excimer lasers

Beam splitters

Laser applications

Lithography

Laser systems engineering

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