Excimer laser: innovation in industrial material processing

Dirk Basting; Heinrich Endert; Rainer Paetzel; Bernard K. Nikolaus

doi:10.1117/12.237721

8 April 1996 Excimer laser: innovation in industrial material processing

Dirk Basting, Heinrich Endert, Rainer Paetzel, Bernard K. Nikolaus

Proceedings Volume 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics; (1996) https://doi.org/10.1117/12.237721
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

Excimer lasers offer unique benefits for a wide range of applications, including industrial materials processing, scientific research and medicine. The benefits of the excimer laser stem from its high peak power output delivered in short pulses at a variety of UV wavelengths. In recent years, technical developments by laser manufacturers have lead to remarkable improvements in excimer performance, reliability and utility, as well as lower cost of ownership. As a result, the market for excimer lasers continues to grow and diversify. In this paper we examine some of the more recent advances, look at various industrial applications that are enabled by excimer lasers, and catch a glimpse of the future direction of this technology.

Citation Download Citation

Dirk Basting, Heinrich Endert, Rainer Paetzel, and Bernard K. Nikolaus "Excimer laser: innovation in industrial material processing", Proc. SPIE 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, (8 April 1996); https://doi.org/10.1117/12.237721

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