Progress in all-solid-state deep-ultraviolet coherent light sources

Michio Oka; L. Y. Liu; Werner Wiechmann; Yasujiro Taguchi; Hiroyuki Wada; Tsutomu Okamoto; Hiroshi Suganuma; Shigeo R. Kubota

doi:10.1117/12.239660

10 May 1996 Progress in all-solid-state deep-ultraviolet coherent light sources

Michio Oka, L. Y. Liu, Werner Wiechmann, Yasujiro Taguchi, Hiroyuki Wada, Tsutomu Okamoto, Hiroshi Suganuma, Shigeo R. Kubota

Author Affiliations +

Proceedings Volume 2700, Nonlinear Frequency Generation and Conversion; (1996) https://doi.org/10.1117/12.239660
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

High power deep ultraviolet (UV) radiation has attracted much attention in areas such as photo-lithography, micro fabrication, material processing and ultra high density optical disk mastering. We report progress in improving the quality of Czochralski-grown (beta) -BaB₂O₄ (BBO) which is essential for generating high average output power in the deep ultraviolet regime. We obtained 1.5 W of cw 266 nm output using an external resonant doubler, 1.3 W of 213 nm output from a flashlamp pumped Q-switched Nd:YAG laser and more than 0.4 W of 213 nm radiation from a commercial 6 W diode-pumped high repetition rate Q-switched Nd:YAG laser using our melt-grown BBO crystals for the nonlinear frequency conversion. Using the cw 266 nm output speckle-free 0.25 micrometers photolithography and micro-fabrication was demonstrated.

Citation Download Citation

Michio Oka, L. Y. Liu, Werner Wiechmann, Yasujiro Taguchi, Hiroyuki Wada, Tsutomu Okamoto, Hiroshi Suganuma, and Shigeo R. Kubota "Progress in all-solid-state deep-ultraviolet coherent light sources", Proc. SPIE 2700, Nonlinear Frequency Generation and Conversion, (10 May 1996); https://doi.org/10.1117/12.239660

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