Paper
25 March 1996 Self-aligning pinhole system
Evan D. Green, Alejandro D. Farinas, Andrew H. Cordes, Timothy Day
Author Affiliations +
Abstract
A practical self-aligning pinhole (SAP) system, capable of actively aligning a pinhole to an incident optical beam, has been demonstrated. The enabling technology for the SAP is a silicon micromachined pinhole (SiMP). The SiMP is an example of a simple optical element fabricated from silicon in order to take advantage of both the mechanical structure allowed by micromachining technology and the electrical structures allowed by semiconductor technology. To complete the transformation from an enabling technology to a working system, development was necessary in packaging, mechanical mounting and operation, and algorithms.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Evan D. Green, Alejandro D. Farinas, Andrew H. Cordes, and Timothy Day "Self-aligning pinhole system", Proc. SPIE 2686, Integrated Optics and Microstructures III, (25 March 1996); https://doi.org/10.1117/12.236135
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Silicon

Sensors

Spatial filters

Algorithm development

Automatic alignment

Control systems

Manufacturing

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