Phase-measuring laser feedback interferometry: applications to microscopy

Ben Ovryn; James H. Andrews; Steven J. Eppell

doi:10.1117/12.237491

10 April 1996 Phase-measuring laser feedback interferometry: applications to microscopy

Ben Ovryn, James H. Andrews, Steven J. Eppell

Proceedings Volume 2655, Three-Dimensional Microscopy: Image Acquisition and Processing III; (1996) https://doi.org/10.1117/12.237491
Event: Electronic Imaging: Science and Technology, 1996, San Jose, CA, United States

Abstract

This brief proceedings paper presents an introduction to our adaptation of the principles of phase shifting interferometry to a laser feedback interferometer. The application of these methods allows a direct measurement of both the optical path length and the fringe modulation. Examination of the spatial variation of both of these quantities over an object's surface provides a quantitative map of the geometry of a sample's surface. We demonstrate that discrete phase shifting methods can be used to accurately measure optical path length changes and fringe modulation.

Citation Download Citation

Ben Ovryn, James H. Andrews, and Steven J. Eppell "Phase-measuring laser feedback interferometry: applications to microscopy", Proc. SPIE 2655, Three-Dimensional Microscopy: Image Acquisition and Processing III, (10 April 1996); https://doi.org/10.1117/12.237491

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