Characterization of a surface micromachined pressure sensor array

William P. Eaton; James H. Smith

doi:10.1117/12.221177

15 September 1995 Characterization of a surface micromachined pressure sensor array

William P. Eaton, James H. Smith

Proceedings Volume 2642, Micromachined Devices and Components; (1995) https://doi.org/10.1117/12.221177
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States

Abstract

A surface micromachined pressure sensor array has been designed and fabricated. The sensors are based upon deformable, silicon nitride diaphragms with polysilicon piezoresistors. Absolute pressure is detected by virtue of reference pressure cavities underneath the diaphragms. For this type of sensor, design tradeoffs must be made among allowable diaphragm deflection, diaphragm size, and desireable pressure ranges. Several fabrication issues were observed and addressed. Offset voltage, sensitivity, and nonlinearity of 100 micrometers diameter sensors were measured.

Citation Download Citation

William P. Eaton and James H. Smith "Characterization of a surface micromachined pressure sensor array", Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); https://doi.org/10.1117/12.221177

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available