Pyroelectric linear array infrared sensors made of La-modified PbTiO3 thin films and their applications

Satoru Fujii; Takeshi Kamata; Shigenori Hayashi; Yoshihiro Tomita; Ryoichi Takayama; Takashi Hirao; Tatsuo Nakayama; Takashi Deguchi

doi:10.1117/12.218262

8 September 1995 Pyroelectric linear array infrared sensors made of La-modified PbTiO₃ thin films and their applications

Satoru Fujii, Takeshi Kamata, Shigenori Hayashi, Yoshihiro Tomita, Ryoichi Takayama, Takashi Hirao, Tatsuo Nakayama, Takashi Deguchi

Author Affiliations +

Proceedings Volume 2552, Infrared Technology XXI; (1995) https://doi.org/10.1117/12.218262
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

A new pyroelectric linear array IR sensor has been developed by using the c-axis oriented La- modified PbTiO₃ (PLT:Pb_1-xLa_xTi_1-x/4O₃) thin films. The PLT thin films were prepared on (100) MgO single crystal substrates by rf-magnetron sputtering method. Without a poling treatment, this PLT thin film has high pyroelectric properties (x equals 0.1; PL10, (epsilon) _r equals 200, pyroelectric coefficient: (gamma) equals 5.5 X 10^-8 C/cm²K). For minimizing the substantial heat capacity, these IR sensors have a unique structure in which eight elements of pyroelectric thin films are supported only by polyimide resin films (thickness equals 3 micrometer). This sensor was fabricated by etching MgO substrates off thoroughly. These IR sensors have a high specific detectivity D^*(500,30,1) of 3.5 X 10⁸ cmHz^1/2/W. A new compact IR sensing system using this linear array sensor can measure thermal distribution (8 X 64) by horizontal sweeping of the vertical linear array elements. The image processing with neural network concept makes possible high-accuracy using a few data from the sensor elements. This sensor system is applied to a new type of room air conditioners to improve the comfort level control.

Citation Download Citation

Satoru Fujii, Takeshi Kamata, Shigenori Hayashi, Yoshihiro Tomita, Ryoichi Takayama, Takashi Hirao, Tatsuo Nakayama, and Takashi Deguchi "Pyroelectric linear array infrared sensors made of La-modified PbTiO₃ thin films and their applications", Proc. SPIE 2552, Infrared Technology XXI, (8 September 1995); https://doi.org/10.1117/12.218262

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