Contrast modulation interferometry

Xinkang Tian; Masahide Itoh; Toyohiko Yatagai

doi:10.1117/12.211879

14 June 1995 Contrast modulation interferometry

Xinkang Tian, Masahide Itoh, Toyohiko Yatagai

Proceedings Volume 2544, Interferometry VII: Techniques and Analysis; (1995) https://doi.org/10.1117/12.211879
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

A contrast modulating technique for interferometric fringe analysis is introduced. The basic idea of the interferometry is employing an amplitude-stepped reference wavefront in an interferometer to generate contrast-modulated interferograms and evaluating the phase of a test wavefront based on intensities of the interferograms. A general phase evaluation algorithm for the interferometry is derived. As an example of the phase measuring technique, we describe a three-step algorithm and an interferometer used to realize a three-step measurement.

Citation Download Citation

Xinkang Tian, Masahide Itoh, and Toyohiko Yatagai "Contrast modulation interferometry", Proc. SPIE 2544, Interferometry VII: Techniques and Analysis, (14 June 1995); https://doi.org/10.1117/12.211879

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