Optoelectronical gas sensors based on surface plasmon resonance in Si-structure

Petr I. Nikitin; Mikhail V. Valeiko; Anatoli A. Beloglazov

doi:10.1117/12.221004

20 September 1995 Optoelectronical gas sensors based on surface plasmon resonance in Si-structure

Petr I. Nikitin, Mikhail V. Valeiko, Anatoli A. Beloglazov

Proceedings Volume 2506, Air Pollution and Visibility Measurements; (1995) https://doi.org/10.1117/12.221004
Event: European Symposium on Optics for Environmental and Public Safety, 1995, Munich, Germany

Abstract

The concept of surface plasmon resonance chemical sensors based on Si substrate is developed which combines a number of advantages of both optical and microelectronical approaches to investigate gaseous media. This type of the gas sensor has been made and tested for the first time. A reversible response to ntirogen dioxide at the level of ppm concentrations has been recorded.

Citation Download Citation

Petr I. Nikitin, Mikhail V. Valeiko, and Anatoli A. Beloglazov "Optoelectronical gas sensors based on surface plasmon resonance in Si-structure", Proc. SPIE 2506, Air Pollution and Visibility Measurements, (20 September 1995); https://doi.org/10.1117/12.221004

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