Practical excimer laser-assisted cleaning of solid surfaces

Hee K. Park; Constantine P. Grigoropoulos; Andrew C. Tam

doi:10.1117/12.203633

1 March 1995 Practical excimer laser-assisted cleaning of solid surfaces

Hee K. Park, Constantine P. Grigoropoulos, Andrew C. Tam

Proceedings Volume 2498, Laser Methods of Surface Treatment and Modification: ALT '94 International Conference; (1995) https://doi.org/10.1117/12.203633
Event: Laser Methods of Surface Treatment and Modification: ALT '94 International Conference, 1994, Konstanz, Germany

Abstract

Pulsed-laser irradiation on a solid surface induces a highly efficient surface cleaning of submicron-sized particulates and undesirable organic overcoat films. The nanosecond-pulsed UV laser irradiation, shortly after the deposition of a thin liquid film on the surface, induces rapid vaporization of the liquid film and removal of particulates (`steam cleaning'). The laser beam also causes ablative photodecomposition of organic film contaminants on the surface (`dry cleaning'). A laser cleaning tool is constructed with an aim toward practical use based on an industrial grade KrF excimer laser. The tool includes a computer-controlled laser beam scanning system and a stable liquid film deposition unit, providing a cleaning rate of over 200 cm²/min. The cleaning strategy and the physical mechanisms of the laser cleaning techniques are also studied.

Citation Download Citation

Hee K. Park, Constantine P. Grigoropoulos, and Andrew C. Tam "Practical excimer laser-assisted cleaning of solid surfaces", Proc. SPIE 2498, Laser Methods of Surface Treatment and Modification: ALT '94 International Conference, (1 March 1995); https://doi.org/10.1117/12.203633

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