Thin-film optical constants and multilayer mirror reflectivity in ultrasoft x-ray range

Igor V. Kozhevnikov; L. L. Balakireva; I. I. Lyakhovskaya; A. I. Parobets; V. V. Kondratenko; Yurii P. Pershin; A. G. Ponomarenko; Anatoli I. Fedorenko; Vladimir E. Levashov; Spartak I. Sagitov; O. I. Tolstikhin; V. A. Chirkov; L. A. Babaeva; Tatjana M. Ivanova; Alexander V. Vinogradov

doi:10.1117/12.200280

23 January 1995 Thin-film optical constants and multilayer mirror reflectivity in ultrasoft x-ray range

Igor V. Kozhevnikov, L. L. Balakireva, I. I. Lyakhovskaya, A. I. Parobets, V. V. Kondratenko, Yurii P. Pershin, A. G. Ponomarenko, Anatoli I. Fedorenko, Vladimir E. Levashov, Spartak I. Sagitov, O. I. Tolstikhin, V. A. Chirkov, L. A. Babaeva, Tatjana M. Ivanova, Alexander V. Vinogradov

Author Affiliations +

Proceedings Volume 2453, X-Ray Optics and Surface Science; (1995) https://doi.org/10.1117/12.200280
Event: X-ray Optics and Surface Science, 1994, none, Russian Federation

Abstract

Optical constants of Si, C, Mo, and Nb thin films as well as of fused quartz and float glass substrates have been determined experimentally in the (lambda) approximately equals 80 - 190 angstrom wavelength range. The dependence of optical constants on film thickness and film production technology is demonstrated. The factors influencing substance permittivity in the soft x-ray range are discussed. It is discovered that the main of them is the presence of impurities introduced into the film during its deposition. The chemical composition of multilayer Mo-Si x-ray mirrors is studied. It is shown that if O, N, and Ar impurities in Si films are taken into account, the available experimental data on the reflectivity and resolution of Mo-Si mirrors in the soft x-ray range can be described quantitatively.

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Igor V. Kozhevnikov, L. L. Balakireva, I. I. Lyakhovskaya, A. I. Parobets, V. V. Kondratenko, Yurii P. Pershin, A. G. Ponomarenko, Anatoli I. Fedorenko, Vladimir E. Levashov, Spartak I. Sagitov, O. I. Tolstikhin, V. A. Chirkov, L. A. Babaeva, Tatjana M. Ivanova, and Alexander V. Vinogradov "Thin-film optical constants and multilayer mirror reflectivity in ultrasoft x-ray range", Proc. SPIE 2453, X-Ray Optics and Surface Science, (23 January 1995); https://doi.org/10.1117/12.200280

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