Silicon micromachining and its applications

Yu-Chong Tai; Chih-Ming Ho

doi:10.1117/12.210457

26 May 1995 Silicon micromachining and its applications

Yu-Chong Tai, Chih-Ming Ho

Proceedings Volume 2448, Smart Structures and Materials 1995: Smart Electronics; (1995) https://doi.org/10.1117/12.210457
Event: Smart Structures and Materials '95, 1995, San Diego, CA, United States

Abstract

Recent development of silicon micromachining technology has made possible the fabrication of many micromechanical devices. Applications of these micromechanical devices are many, but their use for smart structures and materials has just begun. Here, an updated report on the development of a drag-reducing smart skin is given. In order to facilitate the fabrication of the smart skin, we have first developed a new sacrificial-layer etching model for etching phosphosilicate-glass using hydrofluoric acid. This model then leads to the development of two key devices for the skin, including a shear-stress sensor and a magnetic microactuator.

Citation Download Citation

Yu-Chong Tai and Chih-Ming Ho "Silicon micromachining and its applications", Proc. SPIE 2448, Smart Structures and Materials 1995: Smart Electronics, (26 May 1995); https://doi.org/10.1117/12.210457

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available