Deep-UV excimer laser measurements at NIST

Rodney W. Leonhardt; Thomas R. Scott

doi:10.1117/12.209229

22 May 1995 Deep-UV excimer laser measurements at NIST

Rodney W. Leonhardt, Thomas R. Scott

Proceedings Volume 2439, Integrated Circuit Metrology, Inspection, and Process Control IX; (1995) https://doi.org/10.1117/12.209229
Event: SPIE's 1995 Symposium on Microlithography, 1995, Santa Clara, CA, United States

Abstract

The National Institute of Standards and Technology has designed and built two electrically calibrated laser calorimeters as primary standards for absolute energy measurements at the wavelength of 248 nm. Under the sponsorship of SEMATECH, NIST developed the calorimeters to improve measurement of dose energy in excimer laser based microlithography. The calorimeter system can be used to calibrate transfer standards which in turn can be used to calibrate detectors employed for energy measurements of semiconductor wafer exposure. The excimer calorimeter uses a glass filter which functions as a volume absorber that allows collection of nanosecond pulses of laser radiation without suffering damage. The measurement range of the calorimeters is 0.3-25 J, but can be extended to 1 mJ with beamsplitters. Electrical calibration of the calorimeters shows a standard deviation in the calibration factor of less than 0.5% for entire energy range. The total uncertainty of typical power and energy meter calibrations is approximately 2%.

Citation Download Citation

Rodney W. Leonhardt and Thomas R. Scott "Deep-UV excimer laser measurements at NIST", Proc. SPIE 2439, Integrated Circuit Metrology, Inspection, and Process Control IX, (22 May 1995); https://doi.org/10.1117/12.209229

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