The application of Plasma Opening Switch (POS) with microsecond current rise time duration for a source of a high power pulsed ion beam, used for surface treatment is being considered. The experiments are considered on the stored current amplitude in the POS of 200 kA with ion beam duration of 40-80 ns, energy about 1 MeV and current density of 20- 150 A/cm2. The cross-section of this beam reached 1000 cm2. The scaling studies analysis is given which proves the reliability and potential of the said approach for technology needs. The method could be used for processing metal parts with big areas, complicated shapes and surfaces to get enhanced microhardness, corrosion strength, especially in case of stainless steel.
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