Synthesis of high-quality diamond thin film on large area

Chengru Shi; Guofeng Pang; Yan Shi

doi:10.1117/12.190718

26 October 1994 Synthesis of high-quality diamond thin film on large area

Chengru Shi, Guofeng Pang, Yan Shi

Proceedings Volume 2364, Second International Conference on Thin Film Physics and Applications; (1994) https://doi.org/10.1117/12.190718
Event: Thin Film Physics and Applications: Second International Conference, 1994, Shanghai, China

Abstract

Large area high quality diamond films have been synthesized at growth rate of 0.5 approximately equals 2 micrometers /hr by AHFCVD method. Many important improvements have been made compared with conventional HFCVD. With this technique, it is possible to produce high quality diamond films on substrate as large as 15 cm X 15 cm in size at higher growth rate.

Citation Download Citation

Chengru Shi, Guofeng Pang, and Yan Shi "Synthesis of high-quality diamond thin film on large area", Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); https://doi.org/10.1117/12.190718

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