Mask designing of linear variable filters

Jiandong Pan; Fengshan Zhang; Yixun Yan

doi:10.1117/12.190756

26 October 1994 Mask designing of linear variable filters

Jiandong Pan, Fengshan Zhang, Yixun Yan

Proceedings Volume 2364, Second International Conference on Thin Film Physics and Applications; (1994) https://doi.org/10.1117/12.190756
Event: Thin Film Physics and Applications: Second International Conference, 1994, Shanghai, China

Abstract

From the evaporating characteristic of source and some parameters of chamber, the authors of this paper derived out the equation of the contour of the mask which is used to coat linear variable filter (LVFs). According to the special length of substrate, we designed a mask which is used to coat LVFs of the spectra range of 8-14 micrometers by computer, and made stainless masks.

Citation Download Citation

Jiandong Pan, Fengshan Zhang, and Yixun Yan "Mask designing of linear variable filters", Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); https://doi.org/10.1117/12.190756

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