Investigation of the boron-doped CVD diamond films for use in sensors

Shenzhong Yang; Jianzhong Zhu; Youfang Yao; Xingen Lu; Xikang Zhang

doi:10.1117/12.190823

26 October 1994 Investigation of the boron-doped CVD diamond films for use in sensors

Shenzhong Yang, Jianzhong Zhu, Youfang Yao, Xingen Lu, Xikang Zhang

Proceedings Volume 2364, Second International Conference on Thin Film Physics and Applications; (1994) https://doi.org/10.1117/12.190823
Event: Thin Film Physics and Applications: Second International Conference, 1994, Shanghai, China

Abstract

Boron-doped polycrystalline diamond thin films may have some use in electroanalysis since the doped diamond films are electrically conductive and chemically inert. In order to use the boron doped diamond thin films as an active electrode in sensors, we have investigated properties of the boron doped diamond thin films grown on silicon substrates by hot-filament assisted chemical vapor deposition (CVD) using a gas mixture of methane and hydrogen. As-deposited films were characterized by Raman spectroscopy and scanning electron microscopy for their chemical nature and morphology, respectively. In situ doping of boron was achieved by heating H₃BO₃ powder during the deposition. The electrochemical behavior of the boron doped diamond thin film electrodes were investigated using cyclic voltammetry. A reduction peak of Fe³⁺ was observed. Our results show that the boron doped diamond thin films possess suitable properties of an electrode material for use in sensors.

Citation Download Citation

Shenzhong Yang, Jianzhong Zhu, Youfang Yao, Xingen Lu, and Xikang Zhang "Investigation of the boron-doped CVD diamond films for use in sensors", Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); https://doi.org/10.1117/12.190823

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