Analysis of the composition and microstructure in lead zirconate titanate thin films

Jingyu Lian; Yasuyuki Yamamoto; Hiroshi Chihara; Akio Nakata

doi:10.1117/12.190795

26 October 1994 Analysis of the composition and microstructure in lead zirconate titanate thin films

Jingyu Lian, Yasuyuki Yamamoto, Hiroshi Chihara, Akio Nakata

Proceedings Volume 2364, Second International Conference on Thin Film Physics and Applications; (1994) https://doi.org/10.1117/12.190795
Event: Thin Film Physics and Applications: Second International Conference, 1994, Shanghai, China

Abstract

Two nondestructive methods, X-ray Fluorescence Spectrometry (XRE) and Electron Probe Micro Analyzer (EPMA) are studied for the composition analysis in thin film. The operation conditions and parameters of these two methods are discussed. An analysis precision with the standard deviation within 0.005 for the atomic ration of Pb/(Zr + Ti) was obtained by the XRF-FP method. The transformation of perovskite ferroelectric phase from an as-deposited amorphous film prepared by the multi target co-sputtering method with a post annealing process is investigated through the local area quantitative analysis by EPMA. The annealed film with the initial atomic ratio of Pb/(Zr + Ti) < 1.13 were found to be consisted of two phases, perovskite and pyrochlore phases, with the different composition for each other. The surplus of Pb in the initial composition was found to be desirable for getting the perovskite phase through the annealing process.

Citation Download Citation

Jingyu Lian, Yasuyuki Yamamoto, Hiroshi Chihara, and Akio Nakata "Analysis of the composition and microstructure in lead zirconate titanate thin films", Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); https://doi.org/10.1117/12.190795

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