Paper
26 October 1994 1H NMR studies of PETEOS SiO2
Yihua He, Guang Yang, Huanzhang Fan, Chun Fang Xu, Xuewen Wu
Author Affiliations +
Proceedings Volume 2364, Second International Conference on Thin Film Physics and Applications; (1994) https://doi.org/10.1117/12.190800
Event: Thin Film Physics and Applications: Second International Conference, 1994, Shanghai, China
Abstract
1H NMR spectra were obtained for the Plasma-Enhanced Tetraethylorthosilicate (PETEOS) SiO2 film. The 1H spectra consisted of two components with different linewidths, being separated into a narrow Lorentzian and a broad Gaussian. The linewidths narrowed with increasing temperature.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yihua He, Guang Yang, Huanzhang Fan, Chun Fang Xu, and Xuewen Wu "1H NMR studies of PETEOS SiO2", Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); https://doi.org/10.1117/12.190800
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KEYWORDS
Hydrogen

Silica

Temperature metrology

Deposition processes

Glasses

Human-computer interaction

Oxygen

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