On-line SPC-based trigger for control action

R. Russell Rhinehart

doi:10.1117/12.186799

16 September 1994 On-line SPC-based trigger for control action

R. Russell Rhinehart

Proceedings Volume 2336, Manufacturing Process Control for Microelectronic Devices and Circuits; (1994) https://doi.org/10.1117/12.186799
Event: Microelectronic Manufacturing, 1994, Austin, TX, United States

Abstract

A procedure is developed which uses SPC concepts to automatically trigger when control action is justified. The conventional concepts of CUSUM and variance are reformulated for computational simplicity. Including initialization, the algorithm is shown to require 18 lines of executable FORTRAN code. The procedure can be used, for instance, to supervise changes in etch reactor conditions based on successive end run analysis.

Citation Download Citation

R. Russell Rhinehart "On-line SPC-based trigger for control action", Proc. SPIE 2336, Manufacturing Process Control for Microelectronic Devices and Circuits, (16 September 1994); https://doi.org/10.1117/12.186799

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