Two-dimensional (2D) model of a microwave-induced hydrogen plasma

Steven E. Coe; D. S. Bailey; James Anthony Savage; D. Rodway

doi:10.1117/12.187340

28 September 1994 Two-dimensional (2D) model of a microwave-induced hydrogen plasma

Steven E. Coe, D. S. Bailey, James Anthony Savage, D. Rodway

Proceedings Volume 2286, Window and Dome Technologies and Materials IV; (1994) https://doi.org/10.1117/12.187340
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

A 2-D axisymmetric model of a microwave plasma ball reactor, as used in plasma assisted chemical vapor deposition systems, has been developed. The model can be broken down into two main parts. Firstly, a model of the microwave coupling to the discharge and secondly, a collision-radiative-diffusion model of the discharge plasma. Self-consistent solutions are obtained incorporating these two components of the model. The model is able to compute the position, size, and shape of the plasma ball in the reactor in addition to the general discharge properties such as 2-D excited state density, electron density, and electron temperature profiles. In addition to describing the key features of the model, results are presented from initial calculations performed for a hydrogen discharge plasma. These results are compared to experimental measurements to show the predictive capabilities of the model. Also discussed are the latest improvements in the model, which allow it to deal with admixtures of methane and hydrogen. Particular emphasis is put on the key species for diamond deposition and how their concentrations vary with reactor conditions. The model represents a valuable tool for the optimization of diamond deposition systems, and as such, further extensions to the model to improve its predictive capabilities are discussed.

Citation Download Citation

Steven E. Coe, D. S. Bailey, James Anthony Savage, and D. Rodway "Two-dimensional (2D) model of a microwave-induced hydrogen plasma", Proc. SPIE 2286, Window and Dome Technologies and Materials IV, (28 September 1994); https://doi.org/10.1117/12.187340

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available