Paper
7 November 1994 Statistical and operational considerations for designs for x-ray tomographic spectrophotometry to detect, localize, and classify foreign objects in various systems
Alphonsus John Fennelly, Edward L. Fry, Muamer Zukic, Michele Wilson McColgan, Tadeusz J. Janik, Douglas G. Torr
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Abstract
In six companion papers we discuss a capability for x-ray tomographic spectrophotometry at three energy ranges to observe foreign objects in various systems using a novel x-ray optical and photometric approach. We describe new types of thin-film x-ray reflecting filters to provide energy-specific optical trains, inserted into existing x-ray interrogation systems. That is complemented by performing topographic imaging at a few, to several, energies in each case. That provides a full topographic and spectrophotometric analysis. Foreign objects can then be detected, localized, discriminated, and classified, so that they may be dealt with by excision, and replacement with benign system elements. We analyze statistical and operational concerns leading to the design of three systems: The first operates at x-ray energies of 1 - 10 keV; it deals with defects in microelectronic integrated circuits. The second operates at x-ray energies of 10 - 30 keV; it deals with the defects in human tissue. The chemical specificity and image resolution of the system will allow identification, localization, and mensuration of tumors without the need of biopsy. The system which we concentrate this discussion on, the third, operates at x- ray energies of 30 - 70 keV; it deals with the presence in transportation systems of explosive devices, and contraband materials and objects in luggage and cargo. We present the analysis of the statistical features of the detection problem in these types of systems, discussing the operational constraints which limits system performance. After considering the multivariate, multisignature, approach to the problem, we discuss the tomographic and spectrophotometric approach to the problem which yields a better solution to the detection problem within the operational constraints.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alphonsus John Fennelly, Edward L. Fry, Muamer Zukic, Michele Wilson McColgan, Tadeusz J. Janik, and Douglas G. Torr "Statistical and operational considerations for designs for x-ray tomographic spectrophotometry to detect, localize, and classify foreign objects in various systems", Proc. SPIE 2283, X-Ray and Ultraviolet Spectroscopy and Polarimetry, (7 November 1994); https://doi.org/10.1117/12.193202
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KEYWORDS
Signal to noise ratio

X-rays

Tomography

Semiconducting wafers

X-ray optics

Error analysis

Interference (communication)

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