Plastic substrate hardening by PE-CVD

Stefania Menichella; Carlo Misiano; Enrico Simonetti; L. De Carlo

doi:10.1117/12.185801

7 September 1994 Plastic substrate hardening by PE-CVD

Stefania Menichella, Carlo Misiano, Enrico Simonetti, L. De Carlo

Proceedings Volume 2262, Optical Thin Films IV: New Developments; (1994) https://doi.org/10.1117/12.185801
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

The usage of plastic substrates has known a big enhancement driven by ophthalmic applications, but a further spreading can be foreseen in higher technological fields too. As known, two drawbacks are outlined when using these substrate: low scratching resistance; high thermal expansion coefficient, thus bad compatibility with the optical coatings made of inorganic layers. The most widespread solution up to now is a hardening and mechanical matching lacquer coating by dipping, which is well accepted in ophthalmics, but cannot be utilized in precision optics due to its intrinsic thickness disuniformity. Recently similar layers have been realized by Plasma Enhanced Chemical Vapor Deposition. This paper describes Ce.Te.V.'s activities and results in setting up this coating by RF PE-CVD, aimed to both ophthalmics and precision optics. The two different functions (hardening and mechanical matching) and the performances of the coating-with special attention to scratch and thermal shock resistance-are examined. The experimental equipment and the optical and environmental characteristics are described.

Citation Download Citation

Stefania Menichella, Carlo Misiano, Enrico Simonetti, and L. De Carlo "Plastic substrate hardening by PE-CVD", Proc. SPIE 2262, Optical Thin Films IV: New Developments, (7 September 1994); https://doi.org/10.1117/12.185801

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