Study on the hardness of composite films prepared by ion-assisted co-evaporation process

Rung-Ywan Tsai; Fang Chung Ho

doi:10.1117/12.192146

4 November 1994 Study on the hardness of composite films prepared by ion-assisted co-evaporation process

Rung-Ywan Tsai, Fang Chung Ho

Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192146
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France

Abstract

Hardness of TiO₂-MgF₂ and TiO₂-SiO₂ composite films prepared by reactive ion-assisted coevaporation were strongly dependent on the microstructures and evaporation rates of each component. The softening of the composite films at low TiO₂ composition is caused by the dispersion of amorphous TiO₂ particles in the sort amorphous SiO₂ or soft crystalline MgF₂ matrix, which is obtained at the high evaporation rate of SiO₂ or MgF₂. In contrast, the hardening of the composite films at high TiO₂ composition is produced by the dispersion of hard amorphous SiO₂particles or hard crystalline MgF₂ grains with the size <20 nm within the amorphous TiO₂matrix, which is obtained at the low evaporation rate of SiO₂ or MgF₂. In these cased, the evaporation rate of TiO₂ is always maintained at 0.2 nm/s.

Citation Download Citation

Rung-Ywan Tsai and Fang Chung Ho "Study on the hardness of composite films prepared by ion-assisted co-evaporation process", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192146

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