High-resolution optical surface topography measurements

Hans J. Tiziani

doi:10.1117/12.169835

1 March 1994 High-resolution optical surface topography measurements

Hans J. Tiziani

Proceedings Volume 2252, Optical 3D Measurement Techniques II: Applications in Inspection, Quality Control, and Robotics; (1994) https://doi.org/10.1117/12.169835
Event: Optical 3D Measurement Techniques II: Applications in Inspection, Quality Control, and Robotics, 1993, Zurich, Switzerland

Abstract

Optical methods are becoming interesting tools for high-resolution surface topography measurements. Micro- and macrostructure measurement techniques were developed to measure surface topography with resolutions of one micrometer or better. The progress made in the last few years is due to the development of the laser and solid state detector elements together with very powerful computer support for the processing of information. Methods for optical surface topography measurements based on the confocal principle and interferometry, together with future trends and some limitations, are discussed.

Citation Download Citation

Hans J. Tiziani "High-resolution optical surface topography measurements", Proc. SPIE 2252, Optical 3D Measurement Techniques II: Applications in Inspection, Quality Control, and Robotics, (1 March 1994); https://doi.org/10.1117/12.169835

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available