Yield and performance of a production process for reflected magneto-optic spatial light modulators

James P. Karins; William E. Ross; John R. Lucas; Theodore R. Maki; Niels Jacksen; Mark K. Preis; David N. Lambeth; Suresh Santhanam

doi:10.1117/12.169457

1 March 1994 Yield and performance of a production process for reflected magneto-optic spatial light modulators

James P. Karins, William E. Ross, John R. Lucas, Theodore R. Maki, Niels Jacksen, Mark K. Preis, David N. Lambeth, Suresh Santhanam

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Proceedings Volume 2237, Optical Pattern Recognition V; (1994) https://doi.org/10.1117/12.169457
Event: SPIE's International Symposium on Optical Engineering and Photonics in Aerospace Sensing, 1994, Orlando, FL, United States

Abstract

The reflected mode magneto-optic spatial light modulator (R-MOSLM) has been developed over the past couple of years. This development has led to a device that has state-of-the-art performance and is producible. This SLM device is truly compatible with semiconductor manufacturing techniques and is now being fabricated in a production environment. Performance details of individual devices is presented elsewhere. However, in this paper we discuss the measured parameters of multiple devices for statistics, discuss yield and packaging, and describe the impact of its manufacturability on cost. The system description of the correlator system using these devices is reported in a companion paper.

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James P. Karins, William E. Ross, John R. Lucas, Theodore R. Maki, Niels Jacksen, Mark K. Preis, David N. Lambeth, and Suresh Santhanam "Yield and performance of a production process for reflected magneto-optic spatial light modulators", Proc. SPIE 2237, Optical Pattern Recognition V, (1 March 1994); https://doi.org/10.1117/12.169457

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