Three-band 1.0-2.5 um near-infrared InGaAs detector array

Gregory H. Olsen; Michael J. Lange; Marshall J. Cohen; Dong-Su Kim; Stephen R. Forrest

doi:10.1117/12.179693

15 July 1994 Three-band 1.0-2.5 um near-infrared InGaAs detector array

Gregory H. Olsen, Michael J. Lange, Marshall J. Cohen, Dong-Su Kim, Stephen R. Forrest

Proceedings Volume 2225, Infrared Detectors and Focal Plane Arrays III; (1994) https://doi.org/10.1117/12.179693
Event: SPIE's International Symposium on Optical Engineering and Photonics in Aerospace Sensing, 1994, Orlando, FL, United States

Abstract

A novel three wavelength InGaAs focal plane array pixel element for detection at wavelengths from 1.0 to 2.5 micrometers , where each of three wavelength sensitive detectors are individually addressable is described. This device consists of successively smaller bandgap layers in In_xGa_1-xAs (x>=0.53), separated by compositionally graded layers of InAs_yP_1-y to decrease defects induced by lattice mismatch strain with the InP substrate and provide high-bandgap passivation. The various layers were selectively removed so that p-n junctions with different wavelength response could be formed. The three detectors have quantum efficiencies between 55 and 95% for front illumination and 15 and 60% for back illumination, and dark currents from 0.01 to 10 mA/cm².

Citation Download Citation

Gregory H. Olsen, Michael J. Lange, Marshall J. Cohen, Dong-Su Kim, and Stephen R. Forrest "Three-band 1.0-2.5 um near-infrared InGaAs detector array", Proc. SPIE 2225, Infrared Detectors and Focal Plane Arrays III, (15 July 1994); https://doi.org/10.1117/12.179693

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