High-resolution AC thin-film electroluminescence using active matrix on Si substrate

Ron Khormaei; Stephen C. Thayer; Ken Ping; Christopher N. King; Gary M. Dolny; Alfred C. Ipri; Fu-Lung Hsueh; David Furst; Roger G. Stewart; Thomas Keyser; Gerry Becker; Dan R. Kagey; Mark B. Spitzer; M. W. Batty

doi:10.1117/12.177378

10 June 1994 High-resolution AC thin-film electroluminescence using active matrix on Si substrate

Ron Khormaei, Stephen C. Thayer, Ken Ping, Christopher N. King, Gary M. Dolny, Alfred C. Ipri, Fu-Lung Hsueh, David Furst, Roger G. Stewart, Thomas Keyser, Gerry Becker, Dan R. Kagey, Mark B. Spitzer, M. W. Batty

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Proceedings Volume 2218, Helmet- and Head-Mounted Displays and Symbology Design Requirements; (1994) https://doi.org/10.1117/12.177378
Event: SPIE's International Symposium on Optical Engineering and Photonics in Aerospace Sensing, 1994, Orlando, FL, United States

Abstract

Active matrix electroluminescent (AMEL) devices are fabricated using circuitry built on the thin-film single crystal silicon on insulator wafers. A 128 X 128 matrix with 24micrometers pixel pitch (1000 lines/inch) is fabricated with higher than 80% fill factor showing initial brightness of above 500fL and high contrast ratios (>100:1). These devices demonstrated the successful combination of active circuitry fabricated using conventional IC processing with standard electroluminescent processing. This AMEL approach provides the potential for head-mounted displays with a very small profile and high efficiency.

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Ron Khormaei, Stephen C. Thayer, Ken Ping, Christopher N. King, Gary M. Dolny, Alfred C. Ipri, Fu-Lung Hsueh, David Furst, Roger G. Stewart, Thomas Keyser, Gerry Becker, Dan R. Kagey, Mark B. Spitzer, and M. W. Batty "High-resolution AC thin-film electroluminescence using active matrix on Si substrate", Proc. SPIE 2218, Helmet- and Head-Mounted Displays and Symbology Design Requirements, (10 June 1994); https://doi.org/10.1117/12.177378

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KEYWORDS

Silicon

Thin films

Electroluminescence

Crystals

Head-mounted displays

Semiconducting wafers

Thin film devices

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