Integrated planar Fresnel zone lenses for beam forming and coupling

Edgar Pawlowski

doi:10.1117/12.180950

28 July 1994 Integrated planar Fresnel zone lenses for beam forming and coupling

Edgar Pawlowski

Proceedings Volume 2213, Nanofabrication Technologies and Device Integration; (1994) https://doi.org/10.1117/12.180950
Event: Integrated Optoelectronics '94, 1994, Lindau, Germany

Abstract

A new integrated device for coupling light into waveguides or deflecting and focusing the light from waveguide elements is proposed. The device shows flexible design possibilities and compact dimensions. It consists of a combination of a refractive cylindrical microlens and an integrated planar Fresnel zone lens. High coupling efficiencies can be expected by approaching a kinoform profile with multiphase steps. The Fresnel zone lenses and the cylindrical microlenses were fabricated by thin film deposition of SiO_x-multilayers. The measured spot-sizes of the fabricated microlenses are close to the diffraction limited values. A theoretical analysis of coupling tolerances indicates that integrated planar Fresnel zone lens couplers are useful for optical free space interconnects.

Citation Download Citation

Edgar Pawlowski "Integrated planar Fresnel zone lenses for beam forming and coupling", Proc. SPIE 2213, Nanofabrication Technologies and Device Integration, (28 July 1994); https://doi.org/10.1117/12.180950

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KEYWORDS

Waveguides

Lenses

Refractive index

Microlens

Photomasks

Diffraction

Oxygen

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