Overlay sample plan optimization for the detection of higher order contributions to misalignment

Ian D. Fink; Neal T. Sullivan; James S. Lekas

doi:10.1117/12.174141

1 May 1994 Overlay sample plan optimization for the detection of higher order contributions to misalignment

Ian D. Fink, Neal T. Sullivan, James S. Lekas

Proceedings Volume 2196, Integrated Circuit Metrology, Inspection, and Process Control VIII; (1994) https://doi.org/10.1117/12.174141
Event: SPIE's 1994 Symposium on Microlithography, 1994, San Jose, CA, United States

Abstract

Using a commercially available software package, overlay sample plans were evaluated for use in a 0.5 micrometers manufacturing process. Monitor wafers were patterned using a two layer overlay evaluation reticle set. Known values of both grid and field errors were entered into the stepper during the exposure of the second layer to force a controlled range of misregistration. Extensive overlay measurements were collected from these wafers. These detailed data sets were modeled to define the relationships between distortion coefficients reported by the software and those actually entered into the stepper. Using the modeled distortions obtained from the original data set as the `correct' values of overlay distortion present on the die/wafers, it was possible to model subsets of the original data set to determine the most efficient sample plans for manufacturing. The accuracy and uncertainty of the modeled overlay distortions was found to be dependent on the sample plan, both in terms of the number and location of measurements taken.

Citation Download Citation

Ian D. Fink, Neal T. Sullivan, and James S. Lekas "Overlay sample plan optimization for the detection of higher order contributions to misalignment", Proc. SPIE 2196, Integrated Circuit Metrology, Inspection, and Process Control VIII, (1 May 1994); https://doi.org/10.1117/12.174141

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available