Paper
22 September 1993 Grating interference technology and its application
Tie-Bang Xie, Bin Liu Zhao, Dong-Lian Zheng
Author Affiliations +
Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156500
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China
Abstract
Grating interference technology because of its many advantages has been developed greatly in the field of fine metrology. The principle and characteristics of grating interference are analyzed and examples of its successful application are given.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tie-Bang Xie, Bin Liu Zhao, and Dong-Lian Zheng "Grating interference technology and its application", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156500
Lens.org Logo
CITATIONS
Cited by 1 scholarly publication.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Diffraction gratings

Diffraction

Metrology

Sensors

Standards development

Digital electronics

Manufacturing

Back to Top