Generic operational models and factory control

Margeret Pratt

doi:10.1117/12.167362

15 February 1994 Generic operational models and factory control

Margeret Pratt

Proceedings Volume 2091, Microelectronic Processes, Sensors, and Controls; (1994) https://doi.org/10.1117/12.167362
Event: Microelectronic Processing '93, 1993, Monterey, CA, United States

Abstract

Semiconductor equipment suppliers tend to view the world through the lens of their own equipment. Process engineers who typically are responsible for selecting equipment tend to view the world through the lens of a particular process step. Neither of these views is sufficient for the whole semiconductor manufacturing process for making devices out of bare silicon wafers. The focus of this paper is the importance of generic operational models of equipment for automated factory manufacturing, using the Semiconductor Equipment and Materials International standard E30-93, `Generic Model for Communications and Control of SEMI Equipment (GEM)' as an example of the type of operational model that is required. To do this, different areas of GEM will be discussed to provide a better understanding of the kinds of issues that are seen as important by automation engineers and how these issues may impact equipment design.

Citation Download Citation

Margeret Pratt "Generic operational models and factory control", Proc. SPIE 2091, Microelectronic Processes, Sensors, and Controls, (15 February 1994); https://doi.org/10.1117/12.167362

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available