High-speed optical measurement of 3-D surfaces

Alistair J.C. Brown

doi:10.1117/12.168070

1 February 1993 High-speed optical measurement of 3-D surfaces

Alistair J.C. Brown

Proceedings Volume 2088, Laser Dimensional Metrology: Recent Advances for Industrial Application; (1993) https://doi.org/10.1117/12.168070
Event: Laser Dimensional Metrology: Recent Advances for Industrial Application, 1993, Brighton, United Kingdom

Abstract

Micromechanics is placing new demands on surface metrology equipment due to the fragility and small size of the mechanical components being fabricated. For research and development purposes both static measurement of component dimensions and thickness and dynamic measurements of deflection and vibrational amplitude are essential. This paper describes a new laser based non-contacting surface measurement system which is finding increasing application for these tasks. The system employs the dynamic focusing principle and has a measurement range of 1000 micrometers and a vertical resolution of 6 nm. The lateral resolution of the system is 1 micrometers and measurements may be made at up to 10 KHz. A built in observation window allows simultaneous measurement and observation of the measurement spot and surrounding region.

Citation Download Citation

Alistair J.C. Brown "High-speed optical measurement of 3-D surfaces", Proc. SPIE 2088, Laser Dimensional Metrology: Recent Advances for Industrial Application, (1 February 1993); https://doi.org/10.1117/12.168070

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