Excimer laser as a manufacturing tool

Terence R. O'Keeffe; Todd E. Lizotte

doi:10.1117/12.167579

1 February 1994 Excimer laser as a manufacturing tool

Terence R. O'Keeffe, Todd E. Lizotte

Proceedings Volume 2062, Lasers as Tools for Manufacturing; (1994) https://doi.org/10.1117/12.167579
Event: Optical Tools for Manufacturing and Advanced Automation, 1993, Boston, MA, United States

Abstract

In general, laser material processing is carried out using CO₂ and YAG systems. This work typically covers welding, cladding and cutting to produce such unlikely products as juice cans and razor blades. Excimer lasers are fast becoming the next most popular processing machine. They are especially suited for the removal of thermally sensitive materials with minimal heat damage and production of micron sized features. Beginning with what can be achieved in various materials this paper will step through the main requirements in developing a fully operational excimer laser process. This should reflect an efficient beam delivery design, high quality aperture masks and specialized part handling equipment. This paper will also address aspects of motion control, vibration isolation and specialized vision systems.

Citation Download Citation

Terence R. O'Keeffe and Todd E. Lizotte "Excimer laser as a manufacturing tool", Proc. SPIE 2062, Lasers as Tools for Manufacturing, (1 February 1994); https://doi.org/10.1117/12.167579

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