Thin-film photosensor design and fabrication issues for liquid-crystal spatial-light modulators

Pierre R. Barbier; Li Wang; Garret Moddel

doi:10.1117/12.158569

15 October 1993 Thin-film photosensor design and fabrication issues for liquid-crystal spatial-light modulators

Pierre R. Barbier, Li Wang, Garret Moddel

Proceedings Volume 2022, Photodetectors and Power Meters; (1993) https://doi.org/10.1117/12.158569
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Liquid crystal (LC) optically addressed spatial light modulators (OASLMs) have been successfully addressed with semiconductor thin film photosensors. Nematic liquid crystals (NLCs), which are insensitive to the polarity of the applied voltage, are addressed with photoconductive thin film structures having symmetric current-voltage characteristics. Much faster ferroelectric liquid crystals (FLC), which are polarity sensitive, are addressed with asymmetric photodiodes or photoconductive diodes. The highest performance OASLMs have been fabricated using FLCs and a-Si:H photodiodes as the photosensor. In this paper we analyze the role of the thin film photosensor in a LC OASLM and present design criteria. From these criteria we discuss hydrogenated amorphous silicon (a-Si:H) photosensor structures for use in OASLMs. In particular we review the a-Si:H p-i-n photodiode, the transparent conducting oxide (TCO)/intrinsic a-Si:H photoconducting diode, and the metal/insulator/a-Si:H structures which have been successfully incorporated into FLC OASLMs, and the n-i-n photoconductor which has not.

Citation Download Citation

Pierre R. Barbier, Li Wang, and Garret Moddel "Thin-film photosensor design and fabrication issues for liquid-crystal spatial-light modulators", Proc. SPIE 2022, Photodetectors and Power Meters, (15 October 1993); https://doi.org/10.1117/12.158569

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available