Alignment sensor with integrated analog signal processing

Christopher B. Umminger; Charles G. Sodini

doi:10.1117/12.160402

15 October 1993 Alignment sensor with integrated analog signal processing

Christopher B. Umminger, Charles G. Sodini

Proceedings Volume 1996, Optical Alignment; (1993) https://doi.org/10.1117/12.160402
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Automatic alignment is a computationally intensive task that slows some manufacturing processes which require it. In order to improve alignment speed we have designed a sensor that combines the imaging operation with the computation of the alignment error. The sensor is specially designed to work with the surveyor's mark in a two step operation. Coarse alignment is performed by operating as a four quadrant sensor and fine positioning is achieved using edge detection. Photodiodes are used for imaging and integrated amplifiers convert the photocurrents into an alignment error signal which is independent of illumination level. A version of this sensor has been fabricated and preliminary tests show that it functions as expected.

Citation Download Citation

Christopher B. Umminger and Charles G. Sodini "Alignment sensor with integrated analog signal processing", Proc. SPIE 1996, Optical Alignment, (15 October 1993); https://doi.org/10.1117/12.160402

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available