PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
Problems of microelectronics technology applications for diffractive optical elements fabrication have been considered. The results on x-ray diffractive focusing elements are described: amplitude and phase-contrast Fresnel zone plates as well as freestanding gold gratings. The creation of reflected Bragg-Fresnel lenses for soft x-ray range was made on the basis of multilayer x-ray mirrors. Considerable attention was paid to the correction of different distortion factors involved in the electron beam lithography process.
Yu A. Agafonov,Sergey V. Babin,Alexei I. Erko,A. A. Shestakov, andIgor A. Schelokov
"Fabrication of diffractive optical elements for x-ray range", Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); https://doi.org/10.1117/12.165701
ACCESS THE FULL ARTICLE
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
Yu A. Agafonov, Sergey V. Babin, Alexei I. Erko, A. A. Shestakov, Igor A. Schelokov, "Fabrication of diffractive optical elements for x-ray range," Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); https://doi.org/10.1117/12.165701