PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
A magnetic disk surface profilometer employing point to point scanning method is presented. The profilometer can be used to measure flatness, global and local profile in circumference, straightness and local fine profile in radius. The theoretical resolution is 0.3 urn, accuracy of the sensor is better than 0.04 ni, dynamic range is larger than 10 mm.
Jia Wang
"A laser measurement system for measuring flatness, parallelism and perpendicularity of large workpieces", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983AW (23 July 1993); https://doi.org/10.1117/12.2308811
ACCESS THE FULL ARTICLE
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
Jia Wang, "A laser measurement system for measuring flatness, parallelism and perpendicularity of large workpieces," Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983AW (23 July 1993); https://doi.org/10.1117/12.2308811