Molecular design for stabilization of chemical amplification resist toward airborne contamination

Hiroshi Ito; William Preston England; Nicholas J. Clecak; Gregory Breyta; Hoosung Lee; Do Y. Yoon; Ratnam Sooriyakumaran; William D. Hinsberg

doi:10.1117/12.154794

15 September 1993 Molecular design for stabilization of chemical amplification resist toward airborne contamination

Hiroshi Ito, William Preston England, Nicholas J. Clecak, Gregory Breyta, Hoosung Lee, Do Y. Yoon, Ratnam Sooriyakumaran, William D. Hinsberg

Author Affiliations +

Proceedings Volume 1925, Advances in Resist Technology and Processing X; (1993) https://doi.org/10.1117/12.154794
Event: SPIE'S 1993 Symposium on Microlithography, 1993, San Jose, CA, United States

Abstract

This paper describes the first logical approach to the design of chemical amplification resists that are stable toward airborne contamination. This molecular design is based on the observation that uptake of N-methylpyrrolidone (NMP) by thin polymer films is primarily governed by glass transition temperatures (T_g) of the polymers. This concept has led to the design of environmentally very robust chemical amplification resists that provide positive images upon development with aqueous base.

Citation Download Citation

Hiroshi Ito, William Preston England, Nicholas J. Clecak, Gregory Breyta, Hoosung Lee, Do Y. Yoon, Ratnam Sooriyakumaran, and William D. Hinsberg "Molecular design for stabilization of chemical amplification resist toward airborne contamination", Proc. SPIE 1925, Advances in Resist Technology and Processing X, (15 September 1993); https://doi.org/10.1117/12.154794

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available