Paper
4 June 1993 Near-field photodetection optical microscopy (NPOM): a novel probe for optical characterization on a subwavelength spatial scale
Daniel R. Busath, Robert C. Davis, Clayton C. Williams
Author Affiliations +
Proceedings Volume 1855, Scanning Probe Microscopies II; (1993) https://doi.org/10.1117/12.146365
Event: OE/LASE'93: Optics, Electro-Optics, and Laser Applications in Scienceand Engineering, 1993, Los Angeles, CA, United States
Abstract
Near-field Photodetection Optical Microscopy (NPOM) is a new approach to optical surface characterization with sub-wavelength spatial resolution. The technique is based upon the direct detection of local variations in optical intensity near a surface with a photodetector of nanometer size. The ultra-small photodetector probe is raster scanned in close proximity to an optically illuminated surface and the photoresponse of the probe is measured at each point. The local optical information is electronically stored and displayed by computer in a manner similar to all Scanning Probe Microscopies. The resultant image represents the local optical intensity at each point on the illuminated surface. The probe fabrication and a recent experimental demonstration of the probe capabilities will be described.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Daniel R. Busath, Robert C. Davis, and Clayton C. Williams "Near-field photodetection optical microscopy (NPOM): a novel probe for optical characterization on a subwavelength spatial scale", Proc. SPIE 1855, Scanning Probe Microscopies II, (4 June 1993); https://doi.org/10.1117/12.146365
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KEYWORDS
Near field optics

Photodetectors

Silicon

Near field scanning optical microscopy

Optical microscopy

Scanning probe microscopy

Near field

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