Roughness and defect characterization of optical surfaces by light-scattering measurements

Horst Truckenbrodt; Angela Duparre; Uwe Schuhmann

doi:10.1117/12.141001

1 January 1993 Roughness and defect characterization of optical surfaces by light-scattering measurements

Horst Truckenbrodt, Angela Duparre, Uwe Schuhmann

Proceedings Volume 1781, Specification and Measurement of Optical Systems; (1993) https://doi.org/10.1117/12.141001
Event: Optical Systems Design '92, 1992, Berlin, Germany

Abstract

The microtopography of a certain surface is a complicated structure varying across the complete surface. Every surface has different elements of microstructure. In this paper, we consider roughness as a fine structure and defects as large structure elements. Roughness measurement on BK7-glass and CaF₂ samples is considered using different techniques. The comparison includes the automatic scatterometer STREUIX 2 and a TIS-measurement system, the ZYGO microprofilometer MAXIM (DOT) 3D, and the NANO SCOPE III of Digital Instruments. For the investigation of scattering characteristics of different surface defects, a special measuring device was developed. The scattered light distribution of different defects and contaminations measured with this set-up is discussed.

Citation Download Citation

Horst Truckenbrodt, Angela Duparre, and Uwe Schuhmann "Roughness and defect characterization of optical surfaces by light-scattering measurements", Proc. SPIE 1781, Specification and Measurement of Optical Systems, (1 January 1993); https://doi.org/10.1117/12.141001

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