Characteristics of partial pressure analyzers

Charles R. Tilford

doi:10.1117/12.138920

11 January 1993 Characteristics of partial pressure analyzers

Charles R. Tilford

Proceedings Volume 1761, Damage to Space Optics, and Properties and Characteristics of Optical Glass; (1993) https://doi.org/10.1117/12.138920
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

Partial pressure or residual gas analyzers are often invaluable for materials and contamination studies. However, some instrument design features and combination of operating parameters can cause performance features quite different from what many users expect. These unexpected performance characteristics can include pressure-dependent sensitivities, the sensitivity for one gas depending on the pressures of other gases, and time-dependent sensitivities after operation with gases such as oxygen or water. These characteristics can greatly complicate instrument calibration and can cause errors as large as two orders of magnitude. This paper discusses measured performance characteristics for different partial pressure analyzers that illustrate a wide range of performances from the different instruments, as well as several features that seem to be common to most instruments.

Citation Download Citation

Charles R. Tilford "Characteristics of partial pressure analyzers", Proc. SPIE 1761, Damage to Space Optics, and Properties and Characteristics of Optical Glass, (11 January 1993); https://doi.org/10.1117/12.138920

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available