Design review of a broadband three-dimensional scatterometer

Fredrick M. Cady; Mary W. Knighton; Daniel R. Cheever; Brett D. Swimley; Theodore L. Hundtoft; Tod F. Schiff; Mark E. Southwood

doi:10.1117/12.141438

12 February 1993 Design review of a broadband, three-dimensional scatterometer

Fredrick M. Cady, Mary W. Knighton, Daniel R. Cheever, Brett D. Swimley, Theodore L. Hundtoft, Tod F. Schiff, Mark E. Southwood

Author Affiliations +

Proceedings Volume 1753, Stray Radiation in Optical Systems II; (1993) https://doi.org/10.1117/12.141438
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

A design review of a broadband, full reflection hemispherical Bidirectional Scatter Distribution Function (BSDF) instrument is given. Monochromator-based and Fourier Transform Spectrometer-based (FTS) sources are described. The goniometer design shown allows the measurement of full reflection hemisphere scatter with transmission measurements possible.

Citation Download Citation

Fredrick M. Cady, Mary W. Knighton, Daniel R. Cheever, Brett D. Swimley, Theodore L. Hundtoft, Tod F. Schiff, and Mark E. Southwood "Design review of a broadband, three-dimensional scatterometer", Proc. SPIE 1753, Stray Radiation in Optical Systems II, (12 February 1993); https://doi.org/10.1117/12.141438

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