Effect of refractive microlens array fabrication parameters on optical quality

Theresa Rubico Jay; Margaret B. Stern; Robert E. Knowlden

doi:10.1117/12.138886

13 January 1993 Effect of refractive microlens array fabrication parameters on optical quality

Theresa Rubico Jay, Margaret B. Stern, Robert E. Knowlden

Proceedings Volume 1751, Miniature and Micro-Optics: Fabrication and System Applications II; (1993) https://doi.org/10.1117/12.138886
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

Refractive microlens arrays with lens speed F/1 to F/5 are fabricated by the PROM (photoresist refractive optics by melting) technique. Optimal PROM fabrication parameters are determined from interferometric measurements of the optical quality. Elements in a hexagonal PROM microlens array, composed of 10,000 200 micrometers diameter F/2 lenses on 205 micrometers centers, exhibit less than one-tenth wave deviation from sphere. Four planes of these F/2 microlens arrays, each containing 10,000 lenslets have been assembled into an afocal imaging system.

Citation Download Citation

Theresa Rubico Jay, Margaret B. Stern, and Robert E. Knowlden "Effect of refractive microlens array fabrication parameters on optical quality", Proc. SPIE 1751, Miniature and Micro-Optics: Fabrication and System Applications II, (13 January 1993); https://doi.org/10.1117/12.138886

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