Design and fabrication of synthetic lenses in silicon

Albert Stemmer; Helmut Zarschizky; Franz Mayerhofer; Guy Lefranc; Hartmut W. Schneider; Peter C. M. Galloway

doi:10.1117/12.140385

2 March 1993 Design and fabrication of synthetic lenses in silicon

Albert Stemmer, Helmut Zarschizky, Franz Mayerhofer, Guy Lefranc, Hartmut W. Schneider, Peter C. M. Galloway

Proceedings Volume 1732, Holographics International '92; (1993) https://doi.org/10.1117/12.140385
Event: Holographics International '92, 1992, London, United Kingdom

Abstract

We report on the design, calculation, and fabrication of binary and multilevel synthetic lenses realized in silicon. The diffractive patterns of the lenses are computer generated, direct E-beam written, and dry etched into the surface of silicon wafers. This paper describes the fabrication tools used and the techniques applied for the lens fabrication. The data processing as well as the efforts necessary for the electron beam writing are emphasized. Binary as well as multilevel elements are fabricated. First results are given for the performance of binary lenses in terms of diffraction efficiency, the efficiency of laser diode to fiber coupling, and the image quality of lenses.

Citation Download Citation

Albert Stemmer, Helmut Zarschizky, Franz Mayerhofer, Guy Lefranc, Hartmut W. Schneider, and Peter C. M. Galloway "Design and fabrication of synthetic lenses in silicon", Proc. SPIE 1732, Holographics International '92, (2 March 1993); https://doi.org/10.1117/12.140385

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